This application claims priority to German Patent Application Serial No.
The transporting device of claim 1, wherein each bar of the multiplicity of bars comprises at least one of carbon-fiber-reinforced carbon or a ceramic. The transporting device of claim 1, wherein the drive device has at least one chain wheel and wherein each bar of the multiplicity of bars has at least one engaging portion for engaging with the at least one chain wheel, by which each bar of the multiplicity of bars can be coupled with the drive device.ħ. The transporting device of claim 4, wherein the two guiding rails are set up in the returning region in such a way that the path of movement runs in a curved manner.Ħ. The transporting device of claim 1, wherein the guiding rail arrangement comprises a returning region, in which the bars of the multiplicity of bars in each case move along the path of movement, a first direction of movement of the respective bars in the returning region being directed counter to the direction of movement of the respective bars in the transporting region.ĥ. The transporting device of claim 2, wherein the guiding rails run in a straight line in the transporting region of the guiding rail arrangement.Ĥ. The transporting device of claim 1, wherein each bar of the multiplicity of bars has a rotatably mounted roller in each case at its two end portions and wherein the guiding rail arrangement has been set up in such a way that the bars of the multiplicity of bars are in each case mounted with the rotatably mounted rollers in the guiding rail arrangement.ģ. A transporting device for transporting a substrate in a process chamber, the transporting device comprising: a guiding rail arrangement comprising two guiding rails for mounting a multiplicity of bars between the two guiding rails, wherein the two guiding rails form a closed path of movement along which the multiplicity of bars are guided the multiplicity of bars are mounted in the guiding rail arrangement and each of the multiplicity of bars has a substantially rectangular prism shape and a drive device for pushing at least one bar of the multiplicity of bars in such a way that, in a transporting region of the guiding rail arrangement, in each case multiple bars of the multiplicity of bars are pushed against one another and the bars that have been pushed against one another move along the path of movement in the transporting region.Ģ. Kipp, D., “Plastic Material Data Sheets”, 2010, MatWeb, p. ,%dTe Thin Films by Close Spaced Sublimation Technique”, 2006, Materials Reasearch, 9, pp. Pinheiro, W., Falcao, V., Cruz, L., Ferreira, C., “Comparative Study of CdTe Sources Used for Deposition of ir. Kiesewetter, WO 2011/110220, Machine Translation by Espacenet, originally published Sep. Ma, Z., Huang, J., Gu, Y., Jin, B., Chen, G., “Thermal Conductivity and Thermal Expansion Properties of Ain/Ep composite”, 2012, Tras Tech Publications, pp.
Singha, K., “A Short Review on Basalt Fiber”, 2012, International Journal of Textile Science, pp. 22, 2016 for reference purpose only).Įllis, B., Smith, R., “Ploymers-A Property Database”, 2009, Taylor and Francis, 2nd Ed., pp.
German Search Report based on Application No. Final Office Action based on application No. ProQuest Translation of WO 03031292 A2, originally published 2003, p. RBI Performance Products, “Understanding the Differences Between PBI vs PBO”, 2016, p. Kipp, “Plastic Material Data Sheets”, 2010, p. THERMAL PROCESSING CHAMBER AND CONVEYOR BELT FOR USE THEREIN AND METHOD OF PROCESSING PRODUCTĪSHRAE Handbook, “Fundamentals”, 2013, p. Spinner for manufacturing dual-component irregularly-shaped hollow insulation fiber LIGHT OR RADIATION DETECTOR MANUFACTURING METHOD SYSTEM AND PROCESS FOR CADMIUM TELLURIDE (CdTe) RECLAMATION IN A VAPOR DEPOSITION CONVEYOR ASSEMBLYĪSSEMBLY OF COMPONENTS CONNECTED BY A DEVICE THAT MAINTAINS THE INTEGRITY OF THE SURFACE OF ONE OF THE COMPONENTS VAPOR DEPOSITION APPARATUS AND PROCESS FOR CONTINUOUS INDIRECT DEPOSITION OF A THIN FILM LAYER ON A SUBSTRATEĬonveyor Belt for Transporting Hot Material VACUUM INSULATION PANEL AND METHOD FOR MANUFACTURING THE SAME METHOD FOR MAKING SEMICONDUCTING FILM AND PHOTOVOLTAIC DEVICE IN-LINE DEPOSITION SYSTEM AND PROCESS FOR DEPOSITION OF A THIN FILM LAYER MATERIAL HANDLING AND LOAD CONVEYANCE SYSTEMĪCTIVE CONTROL ROLLER TOP MODULAR CONVEYING ASSEMBLY
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